- 제품코드 G059602
- 제품명 전자 빔 시스템
- 가격 가격협의
- 모델명 E-Beam Evaporation System
- 제품분류 측정/계측/검사/시험기검사.시험기.계측기 기타
- 사양 진공상태에서 저항 열, 전자 beam, Plasma를 이용하여 금속 및 비금속 물질을 기체상태로 만들어 기판에 증착 시키는 장비이며, 주로 디스플레이, 반도체, 태양광 제조에 많이 쓰이고 있습니다.
- 세금계산서 가능
- 거래방식
- 상태
- 판매지역 전국
- A/S 여부 가능
- 설치 및 시운전 불가능
상세정보
Electro-Plated Stainless Steel chamber(D-Shaped Box)
4"Diameter View Port on Front Door With Manual Shutter
Single/Multi Pocket E-Beam source with Water Cooled Crucible(4cc up to 75cc) with individual shutter
High Voltage Power Supply(3kw to 15kw)
X-Y Beam Sweep & Controller
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Substrate Stage Rotation & Heating(100℃ up to 400℃)
PC or PLC Controlled System
4"Diameter View Port on Front Door With Manual Shutter
Single/Multi Pocket E-Beam source with Water Cooled Crucible(4cc up to 75cc) with individual shutter
High Voltage Power Supply(3kw to 15kw)
X-Y Beam Sweep & Controller
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Substrate Stage Rotation & Heating(100℃ up to 400℃)
PC or PLC Controlled System