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    제품코드 G020407
    제품명 Motion
    모델명 Air Bearing System
    제품분류 정보통신/프로그램/컴퓨터주변기기/부품
    사양 하단표기
    가격 가격협의 세금계산서 가능
    상태 신품 판매지역 전국
    A/S여부 가능
    설치 및 시운전 불가능
    제품/가격 문의

    오엠에이: 0504-0667-1423

    상세정보
  • Newport의 Air-Bearing System은 Wafer Inspection, Optical Lithography,Nano Imprint Lithography & Memory Repair 어플 리케이션 등으로 사용되고 있으며, 이미 1,000대가 넘는 시스템이 설치되어 사용되고 있다. 여러 종류의Flatform이 있는데, 자 세한 내용은 Newport Website에서 확인 가능하다.

    • pdfAir Bearing Solutions

    • DynamYX™ Datum / General Specifications

    DynamYXTM Datum / General Specifications

    • Acceleration: 3G X-Axis, 5G Y-Axis
    • Velocity: 1000mm/sec
    • Repeatability: ±25nm (long term)
    • Accuracy: 0.2μm (linear encoders)
    • Natural Frequency: 300 Hz
    General Specifications
    General Specifications
    Travel Range (standard, encoder or Interferometer)380 mm X-axis, 350 mm Y-axis
    Travel Range(macimum, encoder)520 mm X-axis, 350 mm Y-axis
    Footerprint (without bridge pillars, standard travel)1040 mm x 918 mm
    Rated Payload (maintanins dynamic specifications)3kg
    Maximum Load Capacity30kg
    Maximum Velocity (rated payload)1000 mm/sec X-axis, 1000 mm/sec Y-axis
    Peak Acceleration (rated payload)3.0 G X-axis, 5.0 G X-axis
    RMS Acceleration (rated payload)1.1 G X-axis, 1.1 G X-axis
    Granite Base Thickness (standard travel)300mm
    Total Weight600kg
    Stiffness, Frist Natural Frequency (rated payload)300Hz
    MTBF20,000hrs
    • HybrYX™ / General Specifications
    • Scan & Step 어플리케이션에 적합하도록 디자인된 시스템으로, Scan Axis는 Air-Bearing 이 Step Axis는 Linear Motor가 적용된 시스템으로 아래와 같은 성능을 갖는다.

    HybrYXTM / General Specifications

    • Jitter & dynamic straightness of less than ± 25nm during high speed motion
    • Better than 0.1% velocity ripple
    • Compact 1200mm by 765mm footprint with 650mm by 350mm travel range
    • Long-life & high MTBF as air bearing is not limited by bearing travel/life- expectancy
    General Specifications
    General Specifications
    Travel Range (standard)380 mm X-axis, 650 mm Y-axis
    Footerprint (without bridge pillars)1200 mm x 765 mm
    Rated Payload (maintanins dynamic specifications)14kg
    Maximum Load Capacity20kg
    Maximum Velocity (rated payload)300 mm/sec X-axis, 600 mm/sec Y-axis (scanning)
    Peak Acceleration (rated payload)3.0 G X-axis, 5.0 G X-axis
    RMS Acceleration (rated payload)1.15 G X-axis, 0.2 G Y-axis
    Granite Base Thickness (standard travel)250mm
    Total Weight750kg
    Stiffness, Frist Natural Frequency (rated payload)150Hz
    MTBF20,000hrs
    DynamYX® RS Reticle pdfDynamYX® RS Reticle
    Positioning Stage    		DynamYX® RS Reticle pdfHybrYX™ Hybrid Air
    Bearing Stage    		DynamYX® RS Reticle pdfHybrYX™ G5 Large Substrate
    Positioning
    DynamYX® RS ReticleHyBrYX XY Hybrid Air Bearing StageHyBrYX G5 LARGE SUBSTRATE POSITIONING STAGE
    DynamYX® RS Reticle pdf DynamYX® GT High-
    Throughput Stage    		DynamYX® RS Reticle pdf DynamYX® DATUM™ Ultura-
    High Performance Stage    		DynamYX® RS Reticle pdfDynamYX® 300 Wafer
    Positioning Stage
    DynamYX GT HIGH THROUGHPUT STAGEDynamYX 300 WAFER POSITIONING STAGE
    판매자 정보
    • 오엠에이
    • 오엠에이
    • 0504-0667-1423
    • http://www.omacom.co.kr/
    • mail@omacom.co.kr
    • 대전광역시 유성구 유성대로1596번길 64 (전민동) 2층
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