|
|
|
|
|
|
 |
|
| - 1단 표준 방식의 Body |
| - 높은 신뢰성, 생산성, 정밀성 |
| - CC-LINK, RS-232 통신 가능 | |
 | |
|
|
|
| | |
| |
 |
|
|
|
|
Item |
Specification |
|
Robot Series |
AWDT1S029-030 |
|
Object SPEC |
6", 8" Wafer |
|
Controlled axis |
4 |
|
Arm type |
Single, Double Arm |
|
Motion
range |
L axis |
±295 mm |
|
R axis |
±295 mm |
|
T axis |
340 deg |
|
Z axis |
300 mm |
|
X axis |
- |
|
Speed |
L axis |
360 deg/s |
|
R axis |
360 deg/s |
|
T axis |
360 deg/s |
|
Z axis |
500 mm/s |
|
X axis |
- |
|
MOTOR SPEC |
L axis |
50W AC Servo Motor Panasonic |
|
R axis |
50W AC Servo Motor Panasonic |
|
T axis |
200W AC Servo Motor Panasonic |
|
Z axis |
200W AC Servo Motor Panasonic |
|
X axis |
- |
|
Repeatability |
±0.1 mm |
|
Clean class |
Class 10 ( 0.1 ㎛ ) |
|
End-effecter |
Vacuum type (Ceramic) |
|
Vacuum level |
- |
|
Variable pitch (mm) |
- |
|
Rated Input Current |
- |
|
Weight |
70kg (X axis제외) |
|
I/O terminal type |
CC-Link / RS-232 | | |
 | |
| |
| |
|
|
