Item 

Specification 

Robot Series 

VWDT1S095-010

Object SPEC 

Wafer 300 mm

Controlled axis 

4

Arm type 

Double Arm 

Motion Range

R1, 2 axis 

±950 mm 

T axis 

±360 deg 

Z axis

100 mm

Speed 

R1, 2 axis 

600 mm/s 

T axis 

180 deg/s 

Z axis

250 mm/s

MOTOR SPEC 

R1, 2 axis 

100W AC Servo Motor Panasonic 

T axis 

100W AC Servo Motor Panasonic 

Z axis

400W AC Servo Motor Panasonic 

Repeatability 

±0.1 mm 

Clean class 

Class 1 ( 0.1 ㎛ ) 

End-effecter 

Fork type (Ceramic)

Vacuum level 

1.0e - 8 Torr 

Rated Input Current 

5A (10A fuse for 220AVC ) 

Weight

45kg 

I/O terminal type 

CC-Link / RS232 

Position Feedback 

ABS Encoders